| 학회 | 한국화학공학회 |
| 학술대회 | 2003년 가을 (10/24 ~ 10/25, 한양대학교) |
| 권호 | 9권 2호, p.2680 |
| 발표분야 | 재료 |
| 제목 | Pattern uniformity control in room-temperature imprint lithography |
| 초록 | Non-uniformity in patterning that can arise in room-temperature imprint lithography is analyzed and a condition is presented under which the uniformity is assured. The condition is developed in such a way that the elastic recovery of stain-hardened polymer after the mold is removed does not cause the non-uniformity. Experimental testing of the condition reveals that it is a reliable criterion for uniform patterning. |
| 저자 | 홍필순 , 이홍희 |
| 소속 | 서울대 |
| 키워드 | imprint; room-temperature; uniformity; elastic recovery |
| VOD | VOD 보기 |
| 원문파일 | 초록 보기 |
